MEMS & MICRO SYSTEMS
Unit wise Class Notes
Lecture Videos
2.6. Quartz Micromachining-1
2.6. Quartz Micromachining-2
2.7 Microstereo Lithography--1
2.7 Microstereo Lithigraphy--2
2.8 Fabrication of Micromachined Microstructures
NPTEL Videos
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Reference Book
MicroSensors MEMS & Smart Devices
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